| Item type |
紀要論文 / Departmental Bulletin Paper(1) |
| 公開日 |
2023-03-30 |
| タイトル |
|
|
タイトル |
広島工業大学におけるクリ-ンル-ムの維持および管理 |
| タイトル |
|
|
タイトル |
Maintenance and Control of Clean Room Equipped for Electronics Education in the Hiroshima Institute of Technology |
|
言語 |
en |
| 言語 |
|
|
言語 |
jpn |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Clean Room Maintenace of the Clean Room |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
departmental bulletin paper |
| 著者 |
田中, 武
川畑, 敬志
Tanaka, Takeshi
Kawabata, Keishi
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
The microelectronics industry in Japan has grown rapidly in recent years. In general, all steps in the semiconductor process are implemented in a clean room. The air in the clean room is maintained at a well-controlled temperature and is continuously filtered and recirculated. Also the air in the clean room is monitored and classified with respect to particulates. A “class 1000” environment has a maximum of 1000 partic1es per cubic foot with particle size larger than 0.5 μm. Five years have passed since the clean rooms of class 1000 and 10000 in the Department of Electronics, Hiroshima Institute of Technology was established in 1986. An outline and the know-how on the maintenance of the clean room is described. |
| 書誌情報 |
広島工業大学研究紀要
巻 26,
p. 161-168,
発行日 1992
|
| 出版者 |
|
|
出版者 |
広島工業大学 |
| ISSN |
|
|
収録物識別子タイプ |
ISSN |
|
収録物識別子 |
03851672 |
| 書誌レコードID |
|
|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AN0021271X |
| フォーマット |
|
|
内容記述タイプ |
Other |
|
内容記述 |
application/pdf |
| 著者版フラグ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
kenkyukiyo26161.pdf (272.6 kB)
