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nanohub を用いた初歩的な半導体プロセス教育
https://it-hiroshima.repo.nii.ac.jp/records/2000055
https://it-hiroshima.repo.nii.ac.jp/records/20000550534143b-bd3c-44ba-911e-3ad871ab4398
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
education24_021-030.pdf (2.6 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2025-03-21 | |||||||||
| タイトル | ||||||||||
| タイトル | nanohub を用いた初歩的な半導体プロセス教育 | |||||||||
| 言語 | ja | |||||||||
| タイトル | ||||||||||
| タイトル | Preliminary Semiconductor Process Education Using Nanohub | |||||||||
| 言語 | en | |||||||||
| 言語 | ||||||||||
| 言語 | jpn | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題URI | degital, semiconductor, nanohub, semiconductor process, TCAD | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | departmental bulletin paper | |||||||||
| 著者 |
田中,武
× 田中,武
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| 抄録 | ||||||||||
| 内容記述タイプ | Abstract | |||||||||
| 内容記述 | In 2002, the National Science Foundation created the Network for Computational Nanotechnology（NCN）, which links universities supporting the National Nanotechnology Initiative by bringing computational tools online, making such tools easy to use, and providing educational materials in support of their use. NCN has also created a unique cyberinfrastructure to support its website, nanoHUB.org, through which researchers, educators, and professionals can collaborate, share resources, and resolve current problems in nanotechnology. Using a TCAD Lab program available on the Nanohub website, it is possible to simulate oxidation and diffusion, which are the basis of semiconductor processes, along with pn junctions, bipolar transistors, MOS capacitors, and MOS transistors, which are the basis of electronic devices. We introduced introductory semiconductor process education to the semiconductor process engineering lectures of the Department of Electrical and Electronic Engineering at the Graduate School of Engineering of Hiroshima Institute of Technology by using the simulation method and results, i.e., by introducing the virtual experimental results and theories of semiconductor processes. |
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| 言語 | en | |||||||||
| bibliographic_information |
巻 24, p. 21-30, 発行日 2025-03-14 |
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| 出版者 | ||||||||||
| 出版者 | 広島工業大学 | |||||||||
| item_10002_source_id_9 | ||||||||||
| 収録物識別子タイプ | ISSN | |||||||||
| 収録物識別子 | 13469983 | |||||||||
| item_10002_source_id_11 | ||||||||||
| 収録物識別子タイプ | NCID | |||||||||
| 収録物識別子 | AA11599121 | |||||||||
| フォーマット | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | application/pdf | |||||||||
| 出版タイプ | ||||||||||
| 出版タイプ | VoR | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
