@article{oai:it-hiroshima.repo.nii.ac.jp:00001152,
 author = {田中, 武 and Takeshi, TANAKA},
 journal = {広島工業大学紀要. 研究編},
 month = {Mar},
 note = {application/pdf, In the PBII method, the ion density in the sheath could be obtained based on the modulator equivalent circuit. In the PBII method, the self-ignitting plasma used in the sterilization process was formed, and the plasma density and sheath length could be calculated from the obtained discharge current-high voltage voltage waveform. Using this method, some of the important parameters such as plasma density and sheath length could be obtained when designing the equipment in the future.},
 pages = {145--154},
 title = {プラズマイオン注入法を用いた薄膜形成、および表面処理},
 volume = {56},
 year = {2022},
 yomi = {タナカ, タケシ}
}