| Item type |
紀要論文 / Departmental Bulletin Paper(1) |
| 公開日 |
2023-03-30 |
| タイトル |
|
|
タイトル |
Review of HIT - IE-BAS joint research during the last 25 years |
| 言語 |
|
|
言語 |
eng |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
joint research, Institute of electronics at the Bulgarian Academy of Sciences, Hiroshima Institute of Technology |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
departmental bulletin paper |
| 著者 |
田中, 武
Katia, VUTOVA
Takeshi, TANAKA
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
The Department of Electronics and Computer Engineering, Hiroshima Institute of Technology (EC-HIT) started the international joint research with the Laboratory “Physical Problems of Elec-tron Beam technologies” of the Institute of Electronics, Bulgarian Academy of Sciences (IEBAS) in 1994. More than 30 papers, included a book chapter, were published by implementing the international joint research under 7 Agreements for Academic Cooperation and Exchange between HIT and IE-BAS. Our international joint research is getting the important position in joint research between Japan and Bulgaria. The semiconductor fabrication process such as thin film deposition, Electron and Ion Lithography, Etching, Ion implantation, Plasma treatment, etc., evaluation technique such as X-ray photo-electron spectroscopy, optical spectroscopy, X-ray diffraction, etc., and their simulation technology were used for application in industry, medical service, medicine manufacture, biotechnology, dental, etc. By providing further steps for developing and extending our bilateral relations, this research partnership between the Hiroshima Institute of Technology and the Institute of electronics at the Bulgarian Academy of Sciences can become more stable in the future. |
| 書誌情報 |
広島工業大学紀要. 研究編
巻 55,
p. 95-100,
発行日 2021-02
|
| 出版者 |
|
|
出版者 |
広島工業大学 |
| ISSN |
|
|
収録物識別子タイプ |
ISSN |
|
収録物識別子 |
13469975 |
| 書誌レコードID |
|
|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AA11599110 |
| フォーマット |
|
|
内容記述タイプ |
Other |
|
内容記述 |
application/pdf |
| 著者版フラグ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
research55_095-100.pdf (1.3 MB)
