2026-03-10T21:35:01Z https://it-hiroshima.repo.nii.ac.jp/oai

oai:it-hiroshima.repo.nii.ac.jp:02000055 2025-04-04T01:58:33Z 1:15:1743393325679

nanohub を用いた初歩的な半導体プロセス教育 Preliminary Semiconductor Process Education Using Nanohub 田中,武 Takeshi TANAKA* application/pdf In 2002, the National Science Foundation created the Network for Computational Nanotechnology（NCN）, which links universities supporting the National Nanotechnology Initiative by bringing computational tools online, making such tools easy to use, and providing educational materials in support of their use. NCN has also created a unique cyberinfrastructure to support its website, nanoHUB.org, through which researchers, educators, and professionals can collaborate, share resources, and resolve current problems in nanotechnology. 　Using a TCAD Lab program available on the Nanohub website, it is possible to simulate oxidation and diffusion, which are the basis of semiconductor processes, along with pn junctions, bipolar transistors, MOS capacitors, and MOS transistors, which are the basis of electronic devices. We introduced introductory semiconductor process education to the semiconductor process engineering lectures of the Department of Electrical and Electronic Engineering at the Graduate School of Engineering of Hiroshima Institute of Technology by using the simulation method and results, i.e., by introducing the virtual experimental results and theories of semiconductor processes. departmental bulletin paper 広島工業大学 2025-03-14 VoR application/pdf 24 21 30 AA11599121 13469983 https://it-hiroshima.repo.nii.ac.jp/record/2000055/files/education24_021-030.pdf https://it-hiroshima.repo.nii.ac.jp/records/2000055 jpn