2026-03-12T11:12:09Z https://it-hiroshima.repo.nii.ac.jp/oai

oai:it-hiroshima.repo.nii.ac.jp:00001073 2023-07-25T10:34:08Z 1:18:388

DV-Xα分子軌道法によるXPSスペクトルの理論と実験的評価およびマテリアルズ・インフォマティクスの応用 The Theoretical and Experimental Estimation about XPS Spectra Using DV-Xα Molecular-Orbital Method and Its Application to Materials Informatics 岡光, 序治 オカミツ, ノブハル 田中, 武 タナカ, タケシ Okamitsu, Nobuharu Tanaka, Takeshi publisher surface analysis XPS DV-Xα SESSA Materials Informatics application/pdf The technology surrounding semiconductors is making a steady progress. They are becoming more integrated by micro fabrication technology and the innovative application of such technology is being developed rapidly by finding or applying new materials. In this study, we pay attention to material surface because it affects the quality of products. We analyze both theoretical and experimental sides and estimate the results synthetically. We will apply this method to Materials Informatics and contribute to developing new materials. 広島工業大学 2019-02 jpn departmental bulletin paper VoR https://it-hiroshima.repo.nii.ac.jp/records/1073 AA11599110 13469975 広島工業大学紀要. 研究編 53 79 88 https://it-hiroshima.repo.nii.ac.jp/record/1073/files/research53_079-088.pdf application/pdf 2.4 MB 2023-03-30